Vibrator element, method of manufacturing vibrator element, vibrator, electronic device, electronic apparatus and moving body

ABSTRACT

A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A 1 , a mass of the first weight is represented as B 1 , an area of the second region is represented as A 2 , and a mass of the second weight is represented as B 2 , B 1 /A 1 &gt;B 2 /A 2  is established.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation patent application of U.S. patent applicationSer. No. 13/947,468 filed Jul. 22, 2013 which claims priority toJapanese Patent Application No. 2012-162384 filed Jul. 23, 2012, both ofwhich are hereby expressly incorporated by reference in theirentireties.

BACKGROUND

1. Technical Field

The present invention relates to a vibrator element, a method ofmanufacturing the vibrator element, a vibrator, an electronic device, anelectronic apparatus and a moving body.

2. Related Art

In the related art, a so-called “double T-shaped” gyro element has beenproposed as a vibrator element that detects an angular velocity (forexample, refer to JP-A-2006-105614).

A gyro element disclosed in JP-A-2006-105614 includes a base portion,first and second detection vibrating arms (detection arms) that extendfrom opposite sides of the base portion along a y axis direction, firstand second connection arms (connection arms) that extend from oppositesides of the base portion along an x axis direction, first and seconddrive vibrating arms (driving arms) that extend from opposite sides ofthe first connection arm along the y axis direction, and third andfourth drive vibrating arms (driving arms) that extend from oppositesides of the second connection arm along the y axis direction.

Further, a weight layer that is provided from the tip of each drivevibrating arm toward the base portion is provided at the tip portion ofeach of the first, second, third and fourth drive vibrating arms. Theweight layer is a mass adjusting film used for adjustment of a resonancefrequency (hereinafter, referred to as a frequency adjustment) of eachdrive vibrating arm, and is formed by a deposition method that uses adeposition mask, or the like. The frequency adjustment is performed byadjusting the resonance frequency of each drive vibrating arm into apredetermined value by removing at least a part of the weight layerusing a laser beam or the like, for example.

However, in a case where the weight layer of each drive vibrating arm isformed by the deposition method that uses the deposition mask, or thelike, an installation position of the deposition mask may deviate. Inparticular, in a case where the installation position of the depositionmask deviates in the extension direction (y axis direction) of eachdrive vibrating arm (vibrating arm), for example, in the first drivevibrating arm and the second drive vibrating arm in which the respectivedrive vibrating arms extend from the opposite sides of the base portion(in opposite directions), the weight layer of the first vibrating armbecomes large and the weight layer of the second vibrating arm becomessmall.

In this way, in a case where the installation position of the depositionmask deviates in the extension direction (y axis direction) of eachdrive vibrating arm, the sizes and masses of the weight layers formed inthe drive vibrating arms that extend in opposite directions becomedifferent from each other (form imbalance). That is, the positions ofthe centers of gravity and masses of the weight layers provided in therespective drive vibrating arms that extend in opposite directionsbecome different from each other. Thus, the vibration balance of thedrive vibrating arms that extend in opposite directions is broken, and afrequency temperature characteristic is deteriorated. Thus, a so-calledtemperature drift occurs.

SUMMARY

An advantage of some aspects of the invention is to solve at least apart of the problems described above, and the invention can beimplemented in the following forms or application examples.

Application Example 1

This application example is directed to a vibrator element including: abase portion; a pair of vibrating arms that extends in oppositedirections from the base portion; a first weight that is spaced from atip of at least one vibrating arm toward the base portion and isprovided in the at least one vibrating arm; and a second weight that isprovided in a region between a tip of the first weight and the tip ofthe at least one vibrating arm, in which when a region where the firstweight is provided is represented as a first region and a region betweenthe tip of the first weight and the tip of the at least one vibratingarm is represented as a second region, an area of the first region isrepresented as A1 and a mass of the first weight is represented as B1,and an area of the second region is represented as A2 and a mass of thesecond weight is represented as B2, B1/A1>B2/A2 is established.

The present inventors found that in the correlation between a weightlayer (weight including a first weight and a second weight) provided ina vibrating arm and temperature drift of a vibrator element, there arethe influence on temperature drift due to a positional imbalance of thecenter of gravity of the weight layer (position change of the weightlayer) and the influence on temperature drift due to a mass imbalance ofthe weight layer. Here, the temperature drift refers to a change infrequency of the vibrator element with respect to temperature change.

Specifically, the mass imbalance of the weight layer has a largeinfluence on the temperature drift compared with the positionalimbalance of the weight layer, and the influence on the temperaturedrift is large as the position of the weight layer is close to the tipof the vibrating arm. Further, the correlation between the massimbalance of the weight layer and the temperature drift of the vibratorelement has a negative inclination, and the correlation between thepositional imbalance of the weight layer and the temperature drift ofthe vibrator element has a positive inclination. That is, by using theweight layer having the above-mentioned configuration, the temperaturedrift due to the mass imbalance of the weight layer and the temperaturedrift due to the influence of the positional imbalance of the weightlayer are offset, and thus, it is possible to reduce the occurrence ofthe temperature drift.

In the vibrator element of the application example, since the pair ofvibrating arms extends from the base portion in opposite directions, ina case where an installation position of a deposition mask deviates inan extension direction of the respective vibrating arms, the positionsof the first weights provided in the respective vibrating arms deviatetoward a tip side at one vibrating arm and deviate toward a base portionside at the other vibrating arm.

Here, the first weight is provided in the first region of the vibratingarm to be spaced from the tip of the vibrating arm, and the secondweight is provided in the second region that is an entire region betweenthe first weight and the tip of the vibrating arm, that is, is providedfrom the first weight toward the tip side of the vibrating arm. When thearea of the first region is represented as A1, the mass of the firstweight is represented as B1, the area of the second region isrepresented as A2, and the mass of the second weight is represented asB2, B1/A1>B2/A2 is established.

According to this configuration, the mass of the second weight having alarge influence on the occurrence of the temperature drift of thevibrator element is reduced, and thus, the negative inclination in thecorrelation between the mass imbalance and the temperature drift of thevibrator element is decreased. At this time, since the first weightforms position deviation inside both the vibrating arms, even though theinfluence on the temperature drift of the vibrator element due to thepositional imbalance results, the positive inclination is not changed inthe correlation between the positional imbalance and the temperaturedrift of the vibrator element.

According to the above-described configuration, the decreased negativeinclination in the correlation between the mass imbalance of the secondweight and the temperature drift of the vibrator element and theoriginally small positive inclination in the correlation between thepositional imbalance of the first weight and the temperature drift ofthe vibrator element are approximately the same in positive and negativevalues. Thus, the correlation between the mass imbalance and thetemperature drift of the vibrator element and the correlation betweenthe positional imbalance and the temperature drift of the vibratorelement are offset, and thus, in a case where the installation positionof the deposition mask deviates in the extension direction of therespective vibrating arms, that is, in a case where the positions of thefirst weight and the second weight provided in each vibrating armdeviate, it is possible to suppress the occurrence of the temperaturedrift of the vibrator element.

This configuration may be applied to both vibrating arms, but may alsobe applied to one vibrating arm of the pair of vibrating arms that ispositioned on an opposite side to the deviation direction of the weight.In this case, it is similarly possible to achieve the above effect. Thatis, the weight having this configuration may be applied to one vibratingarm that is positioned on the opposite side to the deviation directionof the weight.

Application Example 2

This application example is directed to the vibrator element of theapplication example described above, wherein the second weight has awidth smaller than that of the first weight in a direction that isorthogonal to an extension direction of the at least one vibrating arm.

According to this application example, it is possible to decrease thenegative inclination in the correlation between the mass imbalance ofthe second weight having a large influence on the occurrence of thetemperature drift of the vibrator element and the temperature drift ofthe vibrator element. In other words, even in a case where the positionsof the first weight and the second weight provided in each vibrating armdeviate as the installation position of the deposition mask deviates inthe extension direction of the respective vibrating arms, for example,it is possible to suppress the occurrence of the temperature drift ofthe vibrator element.

Application Example 3

This application example is directed to the vibrator element of theapplication example described above, wherein the second weight isprovided in an approximately central portion of the at least onevibrating arm in a direction that is orthogonal to an extensiondirection of the at least one vibrating arm.

According to this application example, the balance of the second weightin the width direction of the vibrating arm is achieved, and thus, it ispossible to further suppress the influence on the temperature drift ofthe vibrator element.

Application Example 4

This application example is directed to the vibrator element of theapplication example described above, wherein the second weight includesa plurality of third weights.

According to this application example, since the second weight includesthe plurality of third weights, it is possible to decrease the negativeinclination in the correlation between the mass imbalance of the secondweight having a large influence on the occurrence of the temperaturedrift of the vibrator element and the temperature drift of the vibratorelement.

Application Example 5

This application example is directed to the vibrator element of theapplication example described above, wherein the first weight isprovided to have a gap with respect to side ends of the at least onevibrating arm along an extension direction of the at least one vibratingarm.

According to this application example, even in a case where theinstallation position of the deposition mask deviates in the widthdirection of the respective vibrating arms, since there is the gapbetween the first weight and the side ends of the vibrating arm, it ispossible to suppress the first weight from going outside each vibratingarm. Thus, even in a case where the first weight deviates in the widthdirection of each vibrating arm, it is possible to prevent theoccurrence of mass change of the first weight.

Application Example 6

This application example is directed to the vibrator element of theapplication example described above, wherein the at least one vibratingarm has a wide portion in which the width of a part of the at least onevibrating arm in a direction that is orthogonal to an extensiondirection of the at least one vibrating arm in a plan view is formed tobe larger than the width of the other part of the at least one vibratingarm in the direction that is orthogonal to the extension direction ofthe at least one vibrating arm, and the first weight and the secondweight are provided in the wide portion.

According to this application example, it is possible to increase themasses of the first weight and the second weight, and to increase afrequency adjustment range.

Application Example 7

This application example is directed to the vibrator element of theapplication example described above, wherein a pair of detectionvibrating arms that extends from the base portion in opposite directionsare provided.

According to this application example, even in a case where thepositions of the first weight and the second weight provided in eachvibrating arm deviate as the installation position of the depositionmask deviates in the extension direction of the respective vibratingarms, for example, it is possible to provide a gyro vibrator elementthat is capable of suppressing the occurrence of the temperature driftof the vibrator element.

Application Example 8

This application example is directed to a method of manufacturing avibrator element, the method including: forming an outer shape thatincludes a base portion and a pair of vibrating arms that extends inopposite directions from the base portion; forming a first weight on atleast one vibrating arm to be spaced from a tip of the at least onevibrating arm toward the base portion and forming a second weight in aregion between a tip of the first weight and the tip of the at least onevibrating arm; and adjusting a resonance frequency of the vibrating armby removing at least a part of at least one of the first weight and thesecond weight or by increasing the mass of at least one of the firstweight and the second weight, in which when a region where the firstweight is provided is represented as a first region and a region betweenthe tip of the first weight and the tip of the at least one vibratingarm is represented as a second region, the area of the first region isrepresented as A1 and the mass of the first weight is represented as B1,and the area of the second region is represented as A2 and the mass ofthe second weight is represented as B2, B1/A1>B2/A2 is established.

According to this application example, it is possible to manufacture avibrator element in which the negative inclination in the correlationbetween the mass imbalance of the second weight having a large influenceon the occurrence of the temperature drift of the vibrator element andthe temperature drift of the vibrator element is decreased. In otherwords, even in a case where the positions of the first weight and thesecond weight provided in each vibrating arm deviate as the installationposition of the deposition mask deviates in the extension direction ofthe respective vibrating arms, for example, it is possible tomanufacture a vibrator element that is capable of suppressing theoccurrence of the temperature drift of the vibrator element.

Application Example 9

This application example is directed to the method according to theapplication example described above, wherein the forming of the firstweight and the second weight includes: forming the first weight on atleast one vibrating arm to be spaced from the tip of the at least onevibrating arm toward the base portion; and forming the second weight inthe region between the tip of the first weight and the tip of the atleast one vibrating arm.

According to this application example, even in a case where thepositions of the first weight and the second weight provided in eachvibrating arm deviate as the installation position of the depositionmask deviates in the extension direction of the respective vibratingarms, it is possible to manufacture a vibrator element that is capableof suppressing the occurrence of the temperature drift of the vibratorelement. Further, since the first weight and the second weight may bemanufactured in separate processes, it is possible to cope with thematerial difference, thickness difference or the like of the respectiveweights, for example.

Application Example 10

This application example is directed to a vibrator including: thevibrator element according to any one of the application examplesdescribed above; and a package that accommodates the vibrator element.

According to this application example, it is possible to provide avibrator in which the occurrence of the temperature drift of thevibrator element is suppressed, that is, the temperature characteristicis enhanced.

Application Example 11

This application example is directed to an electronic device including:the vibrator element according to any one of the application examplesdescribed above; and a circuit element that has at least a function ofdriving the vibrator element.

According to this application example, it is possible to provide anelectronic device in which the occurrence of the temperature drift issuppressed and the temperature characteristic is enhanced.

Application Example 12

This application example is directed to an electronic apparatusincluding the vibrator element according to any one of the applicationexamples described above.

According to this application example, since a vibrator element is usedin which the occurrence of the temperature drift is suppressed and thetemperature characteristic is enhanced, it is possible to provide anelectronic apparatus in which a characteristic against temperaturechange is stabilized.

Application Example 13

This application example is directed to a moving body including thevibrator element according to any one of the application examplesdescribed above.

According to this application example, since a vibrator element is usedin which the occurrence of the temperature drift is suppressed and thetemperature characteristic is enhanced, it is possible to provide amoving body in which a characteristic against temperature change isstabilized.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanyingdrawings, wherein like numbers reference like elements.

FIGS. 1A and 1B are schematic diagrams illustrating an embodiment of avibrator element and an embodiment of a vibrator that uses the vibratorelement according to the invention, in which FIG. 1A is a plan view andFIG. 1B is a front sectional view.

FIG. 2 is a plan view illustrating a gyro element that is a vibratorelement included in a vibrator.

FIGS. 3A and 3B are plan views illustrating driving of a gyro element.

FIGS. 4A and 4B are diagrams illustrating the relationship between aweight and temperature drift of a gyro element in the related art, inwhich FIG. 4A is a partial plan view illustrating the shape of theweight, and FIG. 4B is a graph illustrating the correlation between theamount of deviation of the weight and the amount of temperature drift.

FIGS. 5A and 5B are diagrams illustrating the relationship between aweight and temperature drift of a gyro element according to the presentembodiment, in which FIG. 5A is a partial plan view illustrating theshape of the weight, and FIG. 5B is a graph illustrating the correlationbetween the amount of deviation of the weight and the amount oftemperature drift.

FIGS. 6A and 6B are diagrams illustrating the relationship between aweight and temperature drift of a gyro element according to the presentembodiment, in which FIG. 6A is a partial plan view illustrating theshape of the weight, and FIG. 6B is a graph illustrating the correlationbetween the amount of deviation of the weight and the amount oftemperature drift.

FIGS. 7A to 7C are diagrams illustrating the relationship between aweight and temperature drift of a gyro element according to the presentembodiment, in which FIG. 7A is a partial plan view illustrating theshape of the weight, FIG. 7B is a graph illustrating the correlationbetween the amount of deviation of the weight and the amount oftemperature drift, and FIG. 7C is an enlarged plan view illustratingdetails of the shape of the weight.

FIGS. 8A to 8E are partial plan views illustrating modification examplesof a weight.

FIGS. 9A to 9C are plan views and sectional views illustratingmodification examples of a weight.

FIG. 10 is a flowchart illustrating a method for manufacturing avibrator element according to an embodiment of the invention.

FIG. 11 is a front sectional view illustrating an electronic deviceusing a vibrator element according to an embodiment of the invention.

FIG. 12 is a perspective view illustrating a configuration of a mobilepersonal computer that is an example of an electronic apparatus.

FIG. 13 is a perspective view illustrating a configuration of a mobilephone that is an example of an electronic apparatus.

FIG. 14 is a perspective view illustrating a configuration of a digitalstill camera that is an example of an electronic apparatus.

FIG. 15 is a perspective view illustrating a configuration of anautomobile that is an example of a moving body.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, a vibrator element and a vibrator according to theinvention will be described in detail on the basis of embodiments shownin the accompanying drawings.

EMBODIMENTS

First, an embodiment of a vibrator element and an embodiment of avibrator to which the vibrator element is applied according to theinvention will be described.

FIGS. 1A and 1B are schematic diagrams illustrating embodiments of avibrator element and a vibrator that employs the vibrator elementaccording to the invention, in which FIG. 1A is a plan view and FIG. 1Bis a front sectional view. FIG. 2 is a plan view illustrating a gyroelement that is the vibrator element provided in the vibrator shown inFIGS. 1A and 1B. FIGS. 3A and 3B are plan views illustrating driving ofa gyro element. Hereinafter, as shown in FIGS. 1A and 1B, three axesthat are orthogonal to each other are referred to as an x axis, a y axisand a z axis, and the z axis matches with a thickness direction of avibration device. Further, a direction parallel to the x axis isreferred to as an “x axis direction (second direction)”, a directionparallel to the y axis referred to as a “y axis direction (firstdirection)”, and a direction parallel to the z axis is referred to as a“z axis direction”.

A vibrator 1 shown in FIGS. 1A and 1B includes a gyro element (vibrationelement) 2 that is a vibrator element, and a package 9 that accommodatesthe gyro element 2. Hereinafter, the gyro element 2 and the package 9will be sequentially described in detail.

Gyro Element

FIG. 2 is a plan view of a gyro element that is a vibrator element whenseen from an upper side (the side of a lid 92). A detection signalelectrode, a detection signal wiring, a detection signal terminal, adetection ground electrode, a detection ground wiring, a detectionground terminal, a driving signal electrode, a driving signal wiring, adriving signal terminal, a driving ground electrode, a driving groundwiring, a driving ground terminal, and the like are provided in the gyroelement, but they are not shown in FIG. 2.

The gyro element 2 that is a vibrator element is an “out-of-planedetection” sensor that detects the angular velocity around the z axis,and includes a base material, and plural electrodes, wirings andterminals which are provided on the surface of the base material,although not shown.

The gyro element 2 may be formed of a piezoelectric material such asquartz crystal, lithium tantalite or lithium niobate. Here, quartzcrystal is preferably used. Thus, it is possible to obtain the gyroelement 2 capable of showing excellent vibration characteristics(frequency characteristics).

The gyro element 2 includes a vibrating body 4 that forms a so-calleddouble T shape, a first support section 51 and a second support section52 that are support sections that support the vibrating body 4, and afirst beam 61, a second beam 62, a third beam 63 and a fourth beam 64that are beams that connects the vibrating body 4 with the first andsecond support sections 51 and 52.

The vibrating body 4 is spread on the x-y plane, and has a thickness inthe z axis direction. The vibrating body 4 includes a base portion 41that is positioned at the center thereof, a first detection vibratingarm 421 and a second detection vibrating arm 422 that extend in the yaxis direction from both sides of the base portion 41, a firstconnecting arm 431 and a second connecting arm 432 that extend in the xaxis direction from both sides of the base portion 41, a first drivevibrating arm 441 and a second drive vibrating arm 442 that arevibrating arms that extend in the y axis direction from both sides of atip portion of the first connecting arm 431, and a third drive vibratingarm 443 and a fourth drive vibrating arm 444 that are vibrating armsthat extend in the y axis direction from both sides of a tip portion ofthe second connecting arm 432. Weight sections (hammerheads) 425, 426,445, 446, 447 and 448 that are approximately quadrangular wide portionsthat are larger in width than base end sides are respectively providedat tip portions of the first and second detection vibrating arms 421 and422 and the first, second, third and fourth drive vibrating arms 441,442, 443 and 444. By providing the weight sections 425, 426, 445, 446,447 and 448, the detection sensitivity of the angular velocity of thegyro element 2 is enhanced.

The first and second drive vibrating arms 441 and 442 may extend fromthe middle of the first connecting arm 431 in the extension directionthereof. Similarly, the third and fourth drive vibrating arms 443 and444 may extend from the middle of the second connecting arm 432 in theextension direction thereof.

Further, in this example, the first drive vibrating arm 441, the seconddrive vibrating arm 442, the third drive vibrating arm 443 and thefourth drive vibrating arm 444 extend from the first connecting arm 431and the second connecting arm 432 that extend from the base portion 41,but the base portion 41, the first connecting arm 431 and the secondconnecting arm 432 may be integrally formed as a base portion. That is,the first driving arm, the second driving arm, the third driving arm andthe fourth driving arm may extend from the base portion.

Further, the first and second support sections 51 and 52 extend alongthe x axis direction, respectively, and the vibrating body 4 ispositioned between the first and second support sections 51 and 52. Inother words, the first and second support sections 51 and 52 arearranged to face each other along the y axis direction through thevibrating body 4 axis. The first support body 51 is connected with thebase portion 41 through the first beam 61 and the second beam 62, andthe second support section 52 is connected with the base portion 41through the third beam 63 and the fourth beam 64.

The first beam 61 passes between the first detection vibrating arm 421and the first drive vibrating arm 441 to connect the first supportsection 51 with the base portion 41, the second beam 62 passes betweenthe first detection vibrating arm 421 and the third drive vibrating arm443 to connect the first support section 51 with the base portion 41,the third beam 63 passes between the second detection vibrating arm 422and the second drive vibrating arm 442 to connect the second supportsection 52 with the base portion 41, and the fourth beam 64 passesbetween the second detection vibrating arm 422 and the fourth drivevibrating arm 444 to connect the second support section 52 with the baseportion 41.

Each of the beams 61, 62, 63 and 64 has a meandering portion (S-shapedportion) that extends along the y axis direction while reciprocatingalong the x axis direction, and has elasticity in the x axis directionand the y axis direction. Further, since each of the beams 61, 62, 63and 64 has an elongated shape having the meandering portion, theelasticity is provided in all directions. Thus, even if a shock isapplied from the outside, each of the beams 61, 62, 63 and 64 has afunction of absorbing the shock, and it is possible to reduce orsuppress detection noise due to the shock.

Weight of Gyro Element

Mass adjustment detection arm weight layers 14 and 15 that adjustinherent resonance frequencies of the first detection vibrating arm 421and the second detection vibrating arm 422 into desired frequencies areprovided in the weight section 425 of the first detection vibrating arm421 and the weight section 426 of the second detection vibrating arm422.

A weight 13 c is provided in the weight section 445 of the first drivevibrating arm 441. The weight 13 c includes a first weight 12 c that isprovided in a first region of the first drive vibrating arm 441 that isspaced from the tip of the first drive vibrating arm 441 toward the sideof the base portion 41, and a second weight 11 c that is provided in asecond region between the tip of the first drive vibrating arm 441 andan end of the first weight 12 c on the tip side of the first drivevibrating arm 441 (hereinafter, referred to as a “tip of the firstweight 12 c”).

The first region corresponds to a region of a quadrangular area A1 thatis spaced from the tip of the first drive vibrating arm 441 (tip of theweight section 445) and both sides of the weight section 445. The firstweight 12 c is a quadrangle that is approximately overlaid with thefirst region, and has amass B1. In FIG. 2, the first region iscross-hatched.

The second region corresponds to a region of an area A2 provided in thesecond region that is a region between the tip of the first weight 12 cand the tip of the first drive vibrating arm 441 that faces the tip ofthe first weight 12 c. The second weight 11 c is a quadrangle in thesecond region that is narrower in width than that of the first weight 12c and extends from an approximately central part of the first weight 12c on the tip side of the first drive vibrating arm 441 in the widthdirection (x axis direction) to the tip of the first drive vibrating arm441, and has a mass B2.

In this way, the weight 13 c is formed in a convex form toward the tipside of the first drive vibrating arm 441. The weight 13 c is providedso that the area A1 of the first region, the area A2 of the secondregion, the mass B1 of the first weight 12 c and the mass B2 of thesecond weight 11 c satisfy B1/A1>B2/A2. In this example, since the firstweight 12 c and the second weight 11 c are formed to have the samethickness, and in order to satisfy the above-mentioned relationalexpression, the first weight 12 c is provided to have approximately thesame shape as that of the first region, and the second weight 11 c isprovided so that the width of the second weight 11 c is narrower thanthe width of the second region.

Similarly, a weight 13 d is provided in the weight section 446 of thesecond drive vibrating arm 442. The weight 13 d includes a first weight12 d that is provided in a first region of the second drive vibratingarm 442 that is spaced from the tip of the second drive vibrating arm442 toward the side of the base portion 41, and a second weight lid thatis provided in a second region between the tip of the second drivevibrating arm 442 and an end of the first weight 12 d on the tip side ofthe second drive vibrating arm 442 (hereinafter, referred to as a “tipof the first weight 12 d”).

The first region corresponds to a region of a quadrangular area A1 thatis spaced from the tip of the second drive vibrating arm 442 (tip of theweight section 446) and both sides of the weight section 446. The firstweight 12 d is a quadrangle that is approximately overlaid with thefirst region, and has a mass B1.

The second region corresponds to a region of an area A2 provided in thesecond region that is a region between the tip of the first weight 12 dand the tip of the second drive vibrating arm 442 that faces the tip ofthe first weight 12 d. The second weight lid is a quadrangle that isnarrower in width than that of the first weight 12 d and extends from anapproximately central part of the first weight 12 d on the tip side ofthe second drive vibrating arm 442 in the width direction (x axisdirection) to the tip of the second drive vibrating arm 442 within thesecond region, and has a mass B2.

In this way, the weight 13 d is formed in a convex form toward the tipside of the second drive vibrating arm 442. The weight 13 d is providedso that the area A1 of the first region, the area A2 of the secondregion, the mass B1 of the first weight 12 d and the mass B2 of thesecond weight lid satisfy B1/A1>B2/A2. In this example, since the firstweight 12 d and the second weight lid are formed to have the samethickness, and in order to satisfy the above-mentioned relationalexpression, the first weight 12 d is provided to have approximately thesame shape as that of the first region, and the second weight lid isprovided so that the width of the second weight lid is narrower than thewidth of the second region.

Similarly, a weight 13 a is provided in the weight section 447 of thethird drive vibrating arm 443. The weight 13 a includes a first weight12 a that is provided in a first region of the third drive vibrating arm443 that is spaced from the tip of the third drive vibrating arm 443toward the side of the base portion 41, and a second weight 11 a that isprovided in a second region between the tip of the third drive vibratingarm 443 and an end of the first weight 12 a on the tip side of the thirddrive vibrating arm 443 (hereinafter, referred to as a “tip of the firstweight 12 a”).

The first region corresponds to a region of a quadrangular area A1 thatis spaced from the tip of the third drive vibrating arm 443 (tip of theweight section 447) and both sides of the weight section 447. The firstweight 12 a is a quadrangle that is approximately overlaid with thefirst region, and has a mass B1.

The second region corresponds to a region of an area A2 provided in thesecond region that is a region between the tip of the first weight 12 aand the tip of the third drive vibrating arm 443 that faces the tip ofthe first weight 12 a. The second weight 11 a is a quadrangle that isnarrower in width than that of the first weight 12 a and extends from anapproximately central part of the first weight 12 a on the tip side ofthe third drive vibrating arm 443 in the width direction (x axisdirection) to the tip of the third drive vibrating arm 443 within thesecond region, and has a mass B2.

In this way, the weight 13 a is formed in a convex form toward the tipside of the third drive vibrating arm 443. The weight 13 a is providedso that the area A1 of the first region, the area A2 of the secondregion, the mass B1 of the first weight 12 a and the mass B2 of thesecond weight 11 a satisfy B1/A1>B2/A2. In this example, since the firstweight 12 a and the second weight 11 a are formed to have the samethickness, and in order to satisfy the above-mentioned relationalexpression, the first weight 12 a is provided to have approximately thesame shape as that of the first region, and the second weight 11 a isprovided so that the width of the second weight 11 a is narrower thanthe width of the second region.

Similarly, a weight 13 b is provided in the weight section 448 of thefourth drive vibrating arm 444. The weight 13 b includes a first weight12 b that is provided in a first region of the fourth drive vibratingarm 444 that is spaced from the tip of the fourth drive vibrating arm444 toward the side of the base portion 41, and a second weight 11 bthat is provided in a second region between the tip of the fourth drivevibrating arm 444 and an end of the first weight 12 b on the tip side ofthe fourth drive vibrating arm 444 (hereinafter, referred to as a “tipof the first weight 12 b”).

The first region corresponds to a region of a quadrangular area A1 thatis spaced from the tip of the fourth drive vibrating arm 444 (tip of theweight section 448) and both sides of the weight section 448. The firstweight 12 b is a quadrangle that is approximately overlaid with thefirst region, and has a mass B1.

The second region corresponds to a region of an area A2 provided in thesecond region that is a region between the tip of the first weight 12 band the tip of the fourth drive vibrating arm 444 that faces the tip ofthe first weight 12 b. The second weight 11 b is a quadrangle that isnarrower in width than that of the first weight 12 b and extends from anapproximately central part of the first weight 12 b on the tip side ofthe fourth drive vibrating arm 444 in the width direction (x axisdirection) to the tip of the fourth drive vibrating arm 444 within thesecond region, and has a mass B2.

In this way, the weight 13 b is formed in a convex form toward the tipside of the fourth drive vibrating arm 444. The weight 13 b is providedso that the area A1 of the first region, the area A2 of the secondregion, the mass B1 of the first weight 12 b and the mass B2 of thesecond weight 11 b satisfy B1/A1>B2/A2. In this example, since the firstweight 12 b and the second weight 11 b are formed to have the samethickness, and in order to satisfy the above-mentioned relationalexpression, the first weight 12 b is provided to have approximately thesame shape as that of the first region, and the second weight 11 b isprovided so that the width of the second weight 11 b is narrower thanthe width of the second region.

In this example, the weights 13 a, 13 b, 13 c and 13 d are provided onthe tip sides of two pairs of drive vibrating arms that are the firstdrive vibrating arm 441 and the second drive vibrating arm 442, and thethird drive vibrating arm 443 and the fourth drive vibrating arm 444,but the invention is not limited thereto. For example, the weights 13 a,13 b, 13 c and 13 d may be provided in at least one of the first drivevibrating arm 441 and the second drive vibrating arm 442, and at leastone of the third drive vibrating arm 443 and the fourth drive vibratingarm 444.

By providing the above-mentioned convex weights 13 c, 13 d, 13 a and 13b in the weight section 445 of the first drive vibrating arm 441, theweight section 446 of the second drive vibrating arm 442, the weightsection 447 of the third drive vibrating arm 443 and the weight section448 of the fourth drive vibrating arm 444, it is possible to suppresstemperature drift of the gyro element 2 generated as the weights 13 c,13 d, 13 a and 13 b deviate in the y axis direction. Details thereofwill be described later.

The gyro element 2 with such a configuration detects an angular velocityω around the z axis as follows. In the gyro element 2, if an electricfield is generated between the driving signal electrode (not shown) andthe driving ground electrode (not shown) in a state where the angularvelocity ω is not applied, each of the drive vibrating arms 441, 442,443 and 444 performs flexural vibration in an arrow A direction, asshown in FIG. 3A. Here, the first and second drive vibrating arms 441and 442 and the third and fourth drive vibrating arms 443 and 444perform vibration in a plane-symmetrical manner with respect to the y-zplane passing through the central point G (center of gravity G), andthus, the base portion 41, the first and second connecting arms 431 and432, and the first and second detection vibrating arms 421 and 422 arehardly vibrated.

In a state where the driving vibration is performed, if the angularvelocity ω around the z axis is applied to the gyro element 2, vibrationoccurs as shown in FIG. 3B. That is, the Coriolis force in an arrow Bdirection acts on the drive vibrating arms 441, 442, 443 and 444 and theconnecting arms 431 and 432. Detection vibration in an arrow C directionis excited according to the vibration in the arrow B direction. Further,distortion of the detection vibrating arms 421 and 422 generated due tothe vibration is detected by the detection signal electrode (not shown)and the detection ground electrode (not shown) to calculate the angularvelocity ω.

Package

The package 9 accommodates the gyro element 2. An IC chip or the likesuch as an electronic device (to be described later) that drives thegyro element 2, in addition to the gyro element 2, may be accommodatedin the package 9. The package 9 forms an approximately rectangular shapefrom the planar view (x-y planar view).

The package 9 includes a base 91 that has a concave portion that isopened on an upper surface thereof, and a lid (cover) 92 that is coupledwith the base to cover an opening of the concave portion. Further, thebase 91 includes a tabular bottom plate 911, and a frame-shaped sidewall 912 provided in the periphery of an upper surface of the bottomplate 911. The package 9 has an accommodating space therein, and thegyro element 2 is air-tightly accommodated and installed in theaccommodating space.

The gyro element 2 is fixed to the upper surface of the bottom plate 911through a conductive fixing member 8 such as solder, silver paste or aconductive adhesive (adhesive in which conductive fillers such asmetallic particles are dispersed in a resin material) using the firstand second support sections 51 and 52. As the first and second supportsections 51 and 52 that are positioned at the opposite end portions ofthe gyro element 2 in the y axis direction are fixed to the bottom plate911, the vibrating body 4 of the gyro element 2 is supported at bothends, and thus, it is possible to stably fix the gyro element 2 to thebottom plate 911. Thus, unnecessary vibration (vibration other thandetection vibration) of the gyro element 2 is suppressed, to therebyimprove detection accuracy of the angular velocity ω due to the gyroelement 2.

Further, six conductive fixing members 8 are separately providedcorresponding to (being in contact with) two detection signal terminals714, two detection ground terminals 724, a driving signal terminal 734and a driving ground terminal 744 that are provided in the first andsecond support sections 51 and 52. Further, six connection pads 10 areprovided on the upper surface of the bottom plate 911, corresponding totwo detection signal terminals 714, two detection ground terminals 724,the driving signal terminal 734 and the driving ground terminal 744.Each of the connection pads 10 and any one terminal correspondingthereto are electrically connected to each other through the conductivefixing member 8.

Configuration of Weight

Next, configurations and effects of the weights 13 c, 13 d, 13 a and 13b that are respectively provided in the first drive vibrating arm 441,the second drive vibrating arm 442, the third drive vibrating arm 443and the fourth drive vibrating arm 444 will be described in detailreferring to FIGS. 4A to 7C. For ease of description, the descriptionwill be made referring to the respective drawings including FIGS. 4A and4B showing a configuration in the related art, using the third drivevibrating arm 443 and the fourth drive vibrating arm 444 according tothe present embodiment. Further, since the first drive vibrating arm 441and the second drive vibrating arm 442 have the same configuration,description thereof will not be made.

FIGS. 4A and 4B are diagrams illustrating the relationship between aweight and temperature drift of a gyro element in the related art, inwhich FIG. 4A is a partial plan view illustrating the shape of theweight, and FIG. 4B is a graph illustrating the correlation between theamount of deviation of the weight and the amount of temperature drift.FIGS. 5A and 5B are diagrams illustrating the relationship between aweight and temperature drift of a gyro element according to the presentembodiment, in which FIG. 5A is a partial plan view illustrating theshape of the weight, and FIG. 5B is a graph illustrating the correlationbetween the amount of deviation of the weight and the amount oftemperature drift. FIGS. 6A and 6B are diagrams illustrating therelationship between a weight and temperature drift of a gyro elementaccording to the present embodiment, in which FIG. 6A is a partial planview illustrating the shape of the weight, and FIG. 6B is a graphillustrating the correlation between the amount of deviation of theweight and the amount of temperature drift. FIGS. 7A to 7C are diagramsillustrating the relationship between a weight and temperature drift ofa gyro element according to the present embodiment, in which FIG. 7A isa partial plan view illustrating the shape of the weight, FIG. 7B is agraph illustrating the correlation between the amount of deviation ofthe weight and the amount of temperature drift, and FIG. 7C is anenlarged plan view illustrating details of the shape of the weight.

Here, the amount of temperature drift refers to frequency variation of agyro element depending on a temperature change.

Weight in Related Art Configuration

First, the relationship between a weight in the related art andtemperature drift of a gyro element (hereinafter, referred to as“temperature drift”) will be described referring to FIGS. 4A and 4B. Asshown in FIG. 4A, a weight 21 is provided in the weight section 447 ofthe third drive vibrating arm 443, and a weight 22 is provided in theweight section 448 of the fourth drive vibrating arm 444. The weight 21and the weight 22 are provided from positions L1 and L3 indicated bytwo-dotted lines in the figure to respective tips 447 a and 448 a of theweight sections 447 and 448 so that masses and positions thereof are thesame.

However, in a case where an installation position of a deposition maskwhen the weight 21 and the weight 22 are formed deviates in theextension direction of the third drive vibrating arm 443 and the fourthdrive vibrating arms 444, positions where the weight 21 and the weight22 are formed deviate as indicated by hatched lines in the figure. Sincethe deposition mask is integrally formed so as to correspond to multipleweights of multiple gyro elements 2, if an installation position thereofdeviates, the pair of weights 21 and 22 deviate in the same directionwith the same amount of deviation.

In this example, positional deviation of deviations M1 and M2 (M1 and M2are the same) occurs in the −y axis direction. In the weight 21, an endof the third drive vibrating arm 443 on the root side thereof ispositioned at a position of L2, and in the weight 22, an end of thefourth drive vibrating arm 444 on the root side thereof is positioned ata position of L4.

In this way, as the formation positions of the weights 21 and 22deviate, the masses of the weights 21 and 22 are changed. Thus, the massbalance of the weights 21 and 22 that are formed in the pair of thirddrive vibrating arm 443 and fourth drive vibrating arm 444 is broken,and thus, temperature drift occurs in the gyro element 2 due to the massimbalance.

Next, the correlation between the amount of deviation of the weights 21and 22 and temperature drift will be described referring to the graph inFIG. 4B.

In the related art example, as the mass imbalance of the weights 21 and22 is large (increases), in other words, as the deviation of theinstallation position of the deposition mask in the y axis direction islarge (increases), the temperature drift is large (increases). In thedeviation of the deposition mask in this example, the smaller the weight21 is, the larger the weight 22 is, but if the deposition mask deviatesin the opposite direction, the weight 21 gradually becomes larger, andthe weight 22 becomes smaller. As the mass imbalance is increased inthis way, the correlation between the deviation of the weights 21 and 22and the temperature drift forms an approximate line W1 having a negativeinclination, as shown in FIG. 4B.

Particularly, since the shapes of the weights 21 and 22 in the relatedart extend up to the tips 447 a and 448 a of the weight sections 447 and448, respectively, if the installation position of the deposition maskdeviates in the y axis direction, the mass of the weight 21 is decreasedand the mass of the weight 22 is increased. In such a configuration,since the deviation is directly expressed as a mass change, theinfluence of mass imbalance is increased, and thus, the inclination ofthe approximate line W1 in the figure is increased. That is, thedeviation of the deposition mask greatly affects the temperature drift.

Example 1 of Weight

Next, the relationship between Example 1 of a weight and temperaturedrift of a gyro element (hereinafter, referred to as temperature drift)will be described referring to FIGS. 5A and 5B and FIGS. 6A and 6B. FIG.5A is a partial plan view illustrating a state where a weight deviatesinside a weight section, and FIG. 5B is a graph illustrating thecorrelation between the amount of deviation of the weight and the amountof temperature drift. FIG. 6A is a partial plan view illustrating astate where one weight deviates to go outside a weight section, and FIG.6B is a graph illustrating the correlation between the amount ofdeviation of the weight and the amount of temperature drift.

As shown in FIG. 5A, a weight 25 is provided in the weight section 447of the third drive vibrating arm 443, and a weight 26 is provided in theweight section 448 of the fourth drive vibrating arm 444. The weights 25and 26 are originally provided inside the weight sections 447 and 448 inthe form of rectangular shapes 25 a and 26 a indicated by two-dottedlines in the figure (having a gap with respect to each of tips 447 a and448 a and both sides) so that masses and positions thereof are the same.

However, if an installation position of a deposition mask where theweights 25 and 26 are formed deviates by the deviations M1 and M2 in the−y axis direction, the weights 25 and 26 deviate inside (within theplanes of) the weight sections 447 and 448. In other words, the weights25 and 26 deviate to the degree that the weights 25 and 26 do not gooutside the weight section 447 and 448. In this case, the weights 25 and26 are formed at positions indicated by hatched lines in the figure, andcause positional deviation of the deviations M1 and M2 (M1 and M2 arethe same) in the −y axis direction. In the weight 25, the end of thethird drive vibrating arm 443 on the root side thereof is changed inposition from L1 to L2, and in the weight 26, the end of the fourthdrive vibrating arm 444 on the side of the tip 448 a is changed inposition from L3 to L4.

Since the deposition mask is integrally formed to correspond to theweights 25 and 26 of multiple gyro elements 2, if the installationposition deviates, the pair of weights 25 and 26 deviates in the samedirection with the same amount of deviation. Accordingly, the center ofgravity P1 of the weight 25 moves to the center of gravity P2, and thecenter of gravity P3 of the weight 26 moves to the center of gravity P4.

In this way, as the formation positions of the weights 25 and 26 deviateinside the weight sections 447 and 448, the weights 25 and 26 arechanged in positional (center of gravity) balance without a change inthe mass balance.

However, if the positions of the weights 25 and 26 are close to the tips447 a and 448 a of the third drive vibrating arm 443 and the fourthdrive vibrating arm 444, the influence on the temperature drift isincreased. Thus, the weight 25 of which the center of gravity moves tothe side of the tip 447 a is in a state of pseudo mass increase, and theweight 26 of which the center of gravity moves to the root side is in astate of pseudo mass decrease.

Thus, according to this configuration in which the formation positionsof the weights 25 and 26 deviate inside the weight sections 447 and 448,it is possible to reduce the influence on the temperature drift comparedwith the influence due to mass unevenness in the related art example.

In order to reduce the influence on the temperature drift due to thechange in balance of the center of gravity with respect to the formationpositions of the weights 25 and 26, it is preferable to set intervalsbetween the tips 447 a and 448 a of the weight sections 447 and 448 andthe weights 25 and 26 to be equal to or larger than the sizes of theweights 25 and 26 in the y axis direction. This is effective forreducing the influence due to the mass unevenness generated as theweights 25 and 26 move close to the tips 447 a and 448 a of the weightsections 447 and 448.

The correlation between the deviation of the weights 25 and 26 insidethe weight sections 447 and 448 and temperature drift will be describedreferring to the graph in FIG. 5B.

In the above-described example, the weights 25 and 26 deviate in the −yaxis direction. The weight 25 deviates to the side of the tip 447 a ofthe weight section 447, and the weight 26 deviates to the root side ofthe fourth drive vibrating arm 444. As described above, the weight 25that deviates to the side of the tip 447 a of the weight section 447 isin a state of pseudo mass increase, the mass change becomes opposite,compared with the above-described related art example. Accordingly, asshown in FIG. 5B, the inclination of an approximate line PU1 becomespositive (opposite to the related art example). Further, since the masschange does not directly occur, it is possible to reduce the inclination(absolute value). In other words, it is possible to reduce the influenceon the temperature drift.

Next, a case where the formation of the weight in Example 1 describedreferring to FIGS. 5A and 5B further deviates to go outside the weightsection 447 or 448 will be described referring to FIGS. 6A and 6B. Here,the same description as the above-described description using FIG. 5 isomitted.

As shown in FIG. 6A, the weight 25 is formed in the state of goingoutside the tip 447 a of the weight section 447. In this case, theweights 25 and 26 cause positional deviation of deviations M3 and M4 (M3and M4 are the same), in the −y axis direction, from the rectangularshapes 25 a and 26 a that are the original positions, indicated bytwo-dotted lines in the figure. The weight 25 is changed in positionfrom L1 to L5 at an end thereof on the root side of the third drivevibrating arm 443, and is disposed in a position 25 a′ (indicated bytwo-dotted line) that is outside the weight section 447 at an endthereof on the side of the tip 447 a of the weight section 447. That is,a part of the weight 25 on the side of the tip 447 a is not formed, andthus, the surface area of the weight 25 is decreased. The weight 26 ischanged in position from L3 to L6 at an end thereof on the side of thetip 448 a of the fourth drive vibrating arm 444. Further, the center ofgravity P1 of the weight 25 moves to the center of gravity P5, and thecenter of gravity P3 of the weight 26 moves to the center of gravity P6.

In this way, if the weight 25 goes outside the tip 447 a of the weightsection 447, the above-described influence on the temperature drift dueto the mass imbalance of mass change in the related art example results.This will be described referring to FIG. 6B. Here, since a case wherethe weight 25 goes outside the tip 447 a of the weight section 447 willbe described, the description will be made in the left region withreference to the longitudinal axis in FIG. 6B.

In a case where the weight 25 is inside the weight section 447, theinfluence is applied along the approximate line PU1 having the positiveinclination as described above, but the correlation with the massimbalance due to mass change is added with reference to an inflectionpoint where the weight 25 goes outside the weight section 447. In otherwords, in a left region with reference to the inflection point, that is,in a case where the weight 25 goes outside the weight section 447, thecorrelation of an approximate line (W2+PU1) having an inclinationobtained by adding an approximate line W2 having a negative inclinationthat shows the correlation between mass imbalance and temperature driftdue to mass change and the approximate line PU1 having the positiveinclination that shows the correlation between positional imbalance andtemperature drift due to change in positional (center of gravity)balance is obtained.

In this way, in the weights 25 and 26 of Example 1, in a case wheredeviation of the installation position of the deposition mask occurs, itis possible to suppress the occurrence of temperature drift due to thepositional deviation of the weights 25 and 26. That is, it is possibleto reduce the correlation between the positional deviation of theweights 25 and 26 and the temperature drift.

Example 2 of Weight

Next, the relationship between Example 2 of a weight and temperaturedrift will be described referring to FIGS. 7A to 7C. FIG. 7A is apartial plan view illustrating a state where a weight deviates inside aweight section, FIG. 7B is a graph illustrating the correlation betweenthe amount of deviation of the weight and the amount of temperaturedrift, and FIG. 7C is an enlarged plan view illustrating details of theshape of the weight.

Weights 13 a and 13 b of the present example are formed to have theconfiguration that is described in detail in the above-describedembodiment (the weight of the gyro element). Briefly, the weights 13 aand 13 b include first weights 12 a and 12 b, and second weights 11 aand 11 b that have a mass per unit area that is smaller than that of thefirst weights 12 a and 12 b. Hereinafter, description will be made usingthe weight 13 b provided in the fourth drive vibrating arm 444. Further,a first region represents an entire region where the first weight 12 bis provided. Further, a boundary line between the first region and thesecond region is a boundary where the shape, mass, material, thicknessor the like of the weight 13 b is changed, and corresponds to a tip ofthe first weight 12 b (a side thereof on the tip side of the fourthdrive vibrating element 444).

The weight 13 b includes the first weight 12 b that is provided in thefirst region of the fourth drive vibrating arm 444 that is spaced fromthe tip of the fourth drive vibrating arm 444 toward the side of thebase portion 41, and the second weight 11 b that is provided in thesecond region between the tip of the fourth drive vibrating arm 444 andthe tip of the first weight 12 b.

As described above, the first region corresponds to the region of thearea A1, and the first weight 12 b is a quadrangle that is approximatelyoverlaid with the first region and has the mass B1. Further, the secondregion corresponds to the region of the area A2, and the second weight11 b is a quadrangle that is narrower in width than that of the firstweight 12 b within the second region and has the mass B2. That is, theweight 13 b is formed in a convex form toward the tip side of the fourthdrive vibrating arm 444.

The weight 13 b is provided so that the area A1 of the first region, thearea A2 of the second region, the mass B1 of the first weight 12 b andthe mass B2 of the second weight 11 b satisfy B1/A1>B2/A2. In thisexample, since the first weight 12 b and the second weight 11 b areformed to have the same thickness, and in order to satisfy theabove-mentioned relational expression, the first weight 12 b is providedto have approximately the same shape as that of the first region, andthe second weight 11 b is provided so that the width of the secondweight 11 b is narrower than the width of the second region.

Typically, it is preferable that the weights 13 a and 13 b havesymmetric shapes and the same masses and positions, like weights 13 a′and 13 b′ indicated by two-dotted lines in the figure. However, in asimilar way to the above-described Example 1, in a case where theinstallation position of the deposition mask that forms the weights 13 aand 13 b deviates by deviations M5 and M6 in the −y axis direction, theweights 13 a and the weight 13 b deviate inside the weight sections 447and 448 (within the planar region). FIG. 7A shows a case where theweights 13 a and 13 b deviate to a degree that the weights 13 a and 13 bdo not go outside the weight sections 447 and 448. In this case, theweights 13 a and 13 b are formed at positions indicated by hatched linesin the figure, and cause positional deviation of the deviations M5 andM6 (M5 and M6 are the same) in the −y axis direction.

The weight 13 a moves to the position of L2 that is deviated by thedeviation M5 from the original position L1 at an end thereof on the rootside of the third drive vibrating arm 443, and the weight 13 b moves tothe position of L4 that is deviated by the deviation M6 from theoriginal position L3 at an end thereof on the root side of the fourthdrive vibrating arm 444.

Since the deposition mask is integrally formed to correspond to theweights 13 a and 13 b of multiple gyro elements 2, if the installationposition deviates, the pair of weights 13 a and 13 b deviates in thesame direction with the same deviation. The center of gravity P1 of theweight 13 a moves to the center of gravity P2, and the center of gravityP3 of the weight section 26 moves to the center of gravity P4. Further,in a case where the deposition mask greatly deviates in the −y axisdirection, only the first weight 12 a is formed in the weight section447, and the first weight 12 b and the second weight 11 b are formed inthe weight section 448.

In this way, as the formation positions of the weights 13 a and 13 bdeviate inside (within the planes of) the weight sections 447 and 448,the weights 13 a and 13 b are changed in the mass balance and positional(center of gravity) balance.

As the positional (center of gravity) balance is changed, the firstweight 12 a of which the center of gravity moves toward the tip 447 a isin a state of pseudo mass increase, and the first weight 12 b of whichthe center of gravity moves toward the root side is in a state of pseudomass decrease. In Example 2, due to the second weights 11 a and 11 bhaving a mass per unit area that is smaller than that of the firstweights 12 a and 12 b, the pseudo mass imbalance is offset and theinfluence on the temperature drift is reduced.

In the configuration of Example 2, the reduction of the influence on thetemperature drift will be described referring to FIGS. 7B and 7C. InFIG. 7C, the weight 13 b is used as a representative example.

The weight 13 b of Example 2 includes the first weight 12 b that isformed in a rectangular shape of width S×length T, and the second weight11 b that is formed in a rectangular shape of width S/3×length 2T.

The first weight 12 b is spaced from the tip 448 a of the fourth drivevibrating arm 444 toward the side of the base portion 41, and isprovided within the plane (first region indicated by cross-hatched linesin the figure) of the weight section 448. The second weight 11 b isprovided in the second region that is the region between the tip 448 aof the fourth drive vibrating arm 444 and the tip of the first weight 12b. The second region corresponds to a region indicated by a broken line(dashed line) in the figure, which is a region where the width of thetip of the first weight 12 b in the x axis direction extends to the tip448 a of the fourth drive vibrating arm 444. Here, since the secondweight 11 b is provided with the width (S/3) of ⅓ of the width S of thesecond region, the mass per unit area is formed to be small, comparedwith the first weight 12 b formed in the rectangular shape of widthS×length T that is approximately the same area as that of the firstregion. That is, the weight section 13 b is provided so that the area A1of the first region, the area A2 of the second region, the mass B1 ofthe first weight 12 b and the mass B2 of the second weight 11 b satisfyB1/A1>B2/A2.

In the configuration of Example 2 having the above-described weightlayers, in a case where the formation position of the weight 13 bdeviates in the −y axis direction, the second weight 11 b provided atthe position close to the tip 448 a forms the correlation between massimbalance of the weight and temperature drift, and the first weight 12 bprovided at the position separated from the tip 448 a forms thecorrelation between positional imbalance of the weight and temperaturedrift.

In the weight 13 b of Example 2, since the mass per unit area of thesecond weight 11 b at the position close to the tip 448 a is configuredto be small, it is possible to further reduce the influence on the massimbalance of the weight and temperature drift, compared with Example 1.That is, it is possible to reduce the inclination of an approximate lineW3, shown in FIG. 7B, indicating the influence on the mass imbalance ofthe weight and temperature drift, compared with the inclination of theapproximate line W2 shown in FIG. 6B.

Further, although the first weight 12 b forms the correlation with thepositional imbalance of the weight, since the first weight 12 b isprovided at the position (spaced) separated from the tip 448 a by thedistance at which the second weight 11 b is provided, it is possible toreduce the influence on the positional imbalance of the weight andtemperature drift, compared with Example 1. That is, it is possible toreduce the inclination of an approximate line PU2, shown in FIG. 7B,indicating the influence on the positional imbalance of the weight andtemperature drift, compared with the inclination of the approximate linePU1 shown in FIG. 6B.

Further, since the inclination of the approximate line W3 indicating theinfluence on the mass imbalance of the weight and temperature drift andthe inclination of the approximate line PU2 indicating the influence onthe positional imbalance of the weight and temperature drift areapproximately the same in positive and negative values, the respectiveinfluences are canceled. By adding two approximate lines W3 and PU2, itis possible to obtain an approximate line W3+PU2 almost without theinfluence on the temperature drift. That is, by using the weight 13 bhaving the first weight 12 b and the second weight 11 b, even though theformation position of the weight 13 b deviates in the −y axis directiondue to deviation or the like of the installation position of thedeposition mask, it is possible to minimize the influence on thetemperature drift.

Further, as described above, by setting the width of the second weight11 b to ⅓ of the width of the first weight 12 b, and by reducing themass per unit area of the second weight 11 b compared with the mass perunit area of the first weight 12 b, it is possible to set the absolutevalues of the inclination of the approximate line W3 and the inclinationof the approximate line PU2 to be approximately the same, and thus, itis possible to achieve a simulation result that the approximate line isapproximately overlaid with the transverse axis.

Further, as shown in FIG. 7A, the second weight 11 b provided in thefourth drive vibrating arm 444 has a mass larger than that of the secondweight 11 a provided in the third drive vibrating arm 443. Thus, theinfluence on the temperature drift due to the positional imbalance ofthe first weights 12 a and 12 b and the influence on the temperaturedrift due to the mass imbalance of the second weights 11 a and 11 b areoffset, and thus, the temperature drift is reduced as a whole.

Modification Example of Weight

In the above-mentioned weights 13 a and 13 b, the convex shape isillustrated as an example, but with any configuration in which the massper unit area of the second weight is smaller than the mass per unitarea of the first weight, the same effect is achieved. Representativemodification examples of a weight will be described referring to FIGS.8A to 8E. FIGS. 8A to 8E are enlarged plan views illustrating details ofthe shape of the weight in the modification examples. In thisdescription, a point corresponding to the weight 13 b provided in thefourth drive vibrating arm 444 is used for description, but this may beapplied to the other weights. Further, the first region represents anentire region where the first weight 12 b is provided. Further, aboundary line between the first region and the second region is aboundary where the shape, mass, material, thickness or the like of theweight 13 b is changed, and corresponds to a tip of the first weight 12b (a side thereof on the tip side of the fourth drive vibrating element444).

A weight 13 e of a modification example shown in FIG. 8A includes afirst weight 12 e and a second weight 11 e having amass per unit areathat is smaller than that of the first weight 12 e, and is formed in theweight section 448. The first weight 12 e is provided in a rectangularshape at a position spaced from the tip of the weight section 448. Thesecond weight 11 e is provided in a rectangular shape on the tip side ofthe weight section 448 between the tip of the weight section 448 and thefirst weight 12 e. The second weight 11 e has a small mass as the sizethereof in the width direction (x-axis direction in the embodiment) ofthe weight section 448 is reduced. A boundary line L10 in the figurerepresents a boundary between the first region and the second region.

A weight 13 f of a modification example shown in FIG. 8B includes afirst weight 12 f and a second weight 11 f having a mass per unit areathat is smaller than that of the first weight 12 f, and is formed in theweight section 448. The first weight 12 f is provided in a rectangularshape at a position spaced from the tip of the weight section 448. Thesecond weight 11 f has two third weights 11 f′ and 11 f″ that protrudefrom opposite ends of the first weight 12 f in the width direction(x-axis direction in the embodiment) toward the tip of the weightsection 448, between the tip of the weight section 448 and the firstweight 12 f. The second weight 11 f has a small mass as the size thereofin the width direction (x-axis direction in the embodiment) of theweight section 448 is reduced when two third weights 11 f′ and 11 f″ areadded. The boundary line L10 in the figure represents the boundarybetween the first region and the second region.

A weight 13 h of a modification example shown in FIG. 8C includes afirst weight 12 h and a second weight 11 h having amass per unit areathat is smaller than that of the first weight 12 h, and is formed in theweight section 448. The first weight 12 h is provided in a rectangularshape at a position spaced from the tip of the weight section 448. Thesecond weight 11 h extends from the first weight 12 h between the tip ofthe weight section 448 and the first weight 12 h, and is provided in ashape that its width is reduced (converges) toward the tip of the weightsection 448. The second weight 11 h has a small mass as the size thereofin the width direction (x-axis direction in the embodiment) of theweight section 448 is reduced. The boundary line L10 in the figurerepresents the boundary between the first region and the second region.

A weight 13 k of a modification example shown in FIG. 8D includes afirst weight 12 k and a second weight 11 k having a mass per unit areathat is smaller than that of the first weight 12 k, and is formed in theweight section 448. The first weight 12 k is provided in a rectangularshape at a position spaced from the tip of the weight section 448. Thesecond weight 11 k include three thin rectangular third weights 11 k′,11 k″, and 11 k′″ that are provided between the tip of the weightsection 448 and the first weight 12 k, have a small interval from thefirst weight 12 k, and extend toward the tip of the weight section 448.The second weight 11 k has a small mass as the size thereof in the widthdirection (x-axis direction in the embodiment) of the weight section 448is reduced when three third weights 11 k′, 11 k″, and 11 k′″ are added.The boundary line L10 in the figure represents the boundary between thefirst region and the second region.

A weight 13 m of a modification example shown in FIG. 8E includes afirst weight 12 m and a second weight 11 m having a mass per unit areathat is smaller than that of the first weight 12 m, and is formed in theweight section 448. The first weight 12 m is provided in a rectangularshape at a position spaced from the tip of the weight section 448. Thesecond weight 11 m includes two protrusions (third weights) 11 m′ and 11m″ that are provided between the tip of the weight section 448 and thefirst weight 12 m, form an r-shaped inner side (the inner sides arecurved, arcuate or rounded, and protrude from opposite ends of the firstweight 12 m in the width direction (x-axis direction in the embodiment)toward the tip of the weight section 448. The second weight 11 m has asmall mass as the size thereof in the width direction (x-axis directionin the embodiment) of the weight section 448 is reduced when twoprotrusions (third weights) 11 m′ and 11 m″ are added. In this way, aconfiguration in which a curve is formed in the appearance of the weight13 m may be used. The boundary line L10 in the figure represents theboundary between the first region and the second region.

In the above-described modification examples, several examples in whichthe second weight is divided in plural are described, but contrarily, aconfiguration in which the first weight is divided in plural may beused.

Further, since it is sufficient if the mass per unit area of the secondweight is smaller than that of the first weight, for example, thefollowing configurations may be used.

(1) A second weight is formed to have the same thickness as that of afirst weight, and has a width size narrower than that of the firstweight in the x-axis direction.

(2) As shown in FIG. 9A, a second weight 11 n is formed to have the samethickness and width as those of a first weight 12 n, and is formed of amaterial having a specific gravity smaller than that of the first weight12 n (portion indicated by hatched lines).

(3) As shown in FIG. 9B, a second weight 11 r is formed to have the sameshape as that of a first weight 12 r, and is formed to have a thicknesssmaller than that of the first weight 12 r.

(4) As shown in FIG. 9C, a second weight 11 s is formed to have the sameshape as that of a first weight 12 s, and a mesh (reticular and/orperforated) shape.

Even in the weights having the configurations of the above-describedmodification examples, the same effects as those of the weights havingthe configurations of the embodiments (Examples of the weight) areachieved.

Method of Manufacturing Gyro Element

Next, a method of manufacturing a gyro element according to anembodiment of the invention will be described referring to theaccompanying drawings. FIG. 10 is a flowchart illustrating schematicmanufacturing processes of the gyro element 2 that is the vibratorelement shown in FIG. 2.

First, a substrate such as a quartz plate is prepared. Further, outershapes of the first, second, third and fourth drive vibrating arms 441,442, 443 and 444, the first and second detection vibrating arms 421 and422, and the like shown in FIG. 2 are formed by using a photolithographymethod or the like with respect to the substrate, to form a gyro elementraw glass (step S102).

Then, an electrode film is formed on the surface of the gyro element rawglass (step S104). The electrode film has a configuration in which abase metal layer of Cr or the like is formed to improve adhesiveness tothe quartz and an Au layer is formed on a front surface thereof, forexample. The electrode film may be formed using a deposition method, asputtering method or the like.

Then, as shown in FIG. 2, the detection arm weight layers 14 and 15 areformed in the weight sections 425 and 426 of the tip portions of thefirst and second detection vibrating arms 421 and 422, and the weights13 a, 13 b, 13 c and 13 d are formed in the weight sections 445, 446,447 and 448 of the tip portions of the first, second, third and fourthdrive vibrating arms 441, 442, 443 and 444 (step S106).

Here, the weights 13 a, 13 b, 13 c and 13 d include the first weights 12a, 12 b, 12 c and 12 d that are spaced from the tips of the first,second, third and fourth drive vibrating arms 441, 442, 443 and 444, andthe second weights 11 a, 11 b, 11 c and 11 d that are provided betweenthe tips of the first, second, third and fourth drive vibrating arms441, 442, 443 and 444 and the first weights 12 a, 12 b, 12 c and 12 dand have a mass per unit area that is smaller than that of the firstweight 12 a.

A process of forming the first weights 12 a, 12 b, 12 c and 12 d and aprocess of forming the second weights 11 a, 11 b, 11 c and 11 d may bedifferent from each other. As the formation of the first weights 12 a,12 b, 12 c and 12 d and the formation of the second weights 11 a, 11 b,11 c and 11 d are made by different processes, it is possible to copewith the different materials, different thicknesses, any mesh shape, orthe like of the first weights 12 a, 12 b, 12 c and 12 d and the secondweights 11 a, 11 b, 11 c and 11 d.

The detection arm weight layers 14 and 15 and the weights 13 a, 13 b, 13c and 13 d have a configuration in which a metal layer of Au or the likeis formed by a deposition method, a sputtering method or the like usinga metal mask or the like, and the thickness of the layer is formed to bethicker than the electrode film.

Then, a mass adjustment of the first and second detection vibrating arms421 and 422 is performed, and inherent resonance frequencies of thefirst and second detection vibrating arms 421 and 422 are adjusted intodesired frequencies (step S108). The mass adjustment is performed foradjustment of detuning frequencies, and for example, is performed bymelting and evaporating at least apart of the detection arm weightlayers 14 and 15 formed in the first and second detection vibrating arms421 and 422 to be removed by irradiation of a converged laser beam. Ifnecessary, the electrode film may be melted and evaporated to beremoved. Further, the masses of the detection arm weight layers 14 and15 may be increased.

Then, the mass adjustment of the first, second, third and fourth drivevibrating arms 441, 442, 443 and 444 is performed, and inherentresonance frequencies of the first, second, third and fourth drivevibrating arms 441, 442, 443 and 444 are adjusted into desiredfrequencies, to perform a vibrating arm frequency adjustment (stepS110). Further, the mass adjustment has a function of preventing aso-called vibration leakage in which flexural vibrations of the first,second, third and fourth drive vibrating arms 441, 442, 443 and 444propagate to the first and second detection vibrating arms 421 and 422through the first connecting arm 431 and the second connecting arm 432.

The vibrating arm frequency adjustment changes the inherent resonancefrequencies of the respective first, second, third and fourth drivevibrating arms 441, 442, 443 and 444, and adjusts the inherent resonancefrequencies of the respective first, second, third and fourth drivevibrating arms 441, 442, 443 and 444 to match with each other. Thevibrating arm frequency adjustment (mass adjustment) is performed bymelting and evaporating at least a part of the weights 13 a, 13 b, 13 cand 13 d formed in the first, second, third and fourth drive vibratingarms 441, 442, 443 and 444 to be removed by irradiation of a convergedlaser beam, for example. Further, the masses of the weights 13 a, 13 b,13 c and 13 d may be increased.

The vibrating arm frequency adjustment is performed by a so-calledcoarse adjustment of roughly adjusting inherent resonance frequenciesand a so-called fine adjustment of adjusting inherent resonancefrequencies according to fine mass adjustment.

Further, the vibrating arm frequency adjustment may be performed byremoving at least either the first weights 12 a, 12 b, 12 c, and 12 d orthe second weights 11 a, 11 b, 11 c and 11 d that form the weights 13 a,13 b, 13 c, and 13 d. Further, the masses of at least either the firstweights 12 a, 12 b, 12 c, and 12 d or the second weights 11 a, 11 b, 11c and 11 d that form the weights 13 a, 13 b, 13 c, and 13 d may beincreased.

Then, an electric characteristic of the gyro element is checked and thegyro element 2 having a desired characteristic is selected, to therebycomplete the gyro element 2 (step S112).

According to the above-described manufacturing method of the gyroelement 2 that is the vibrator element, the detection arm weight layers14 and 15 and the weights 13 a, 13 b, 13 c and 13 d may be formed by thesame process. Further, since the first weights 12 a, 12 b, 12 c, and 12d and the second weights 11 a, 11 b, 11 c and 11 d that form the weights13 a, 13 b, 13 c and 13 d may also be formed by the same process, it ispossible to manufacture the gyro element 2 with high efficiency.

In the above description, the gyro sensor using the so-called doubleT-shaped gyro element is illustrated as an example of the element, butthe element according to the embodiments of the invention is not limitedto the double T-shaped gyro element. Any element having vibrating armsthat extend in opposite directions from a base portion may be used. Asthe element according to the embodiments of the invention, for example,a so-called H-shaped gyro element, a vibrator element having tuning forktype vibrating arms that extend in opposite directions from a baseportion, or the like may be used.

Electronic Device

Next, a gyro sensor that is an example of an electronic device that usesthe gyro element 2 will be described referring to FIG. 11. FIG. 11 is afront sectional view schematically illustrating a gyro sensor.

A gyro sensor 80 includes a gyro element 2 that is a vibrator element,an IC 84 that is a circuit element, and a container 81 that is apackage, and a cover 86. The IC 84 is disposed on a bottom surface ofthe container 81 made of ceramics or the like, and is electricallyconnected with a wiring (not shown) formed in the container 81 by a wire85 of Au or the like. The IC 84 includes a drive circuit for driving andvibrating the gyro element 2, and a detection circuit that detectsdetection vibration generated in the gyro element 2 when an angularvelocity is applied.

The gyro element 2 is adhered and supported to a support 82 formed inthe container 81 through a fixing member 83 such as a conductiveadhesive at support portions 51 and 52 of the gyro element 2. Further, awiring (not shown) is formed on the surface of the support 82, andconduction between an electrode of the gyro element 2 and the wiring isachieved through the fixing member 83. It is preferable that the fixingmember 83 be formed of an elastic material. As the elastic fixingmaterial 83, a conductive adhesive or the like in which silicone is usedas a base material is known. Further, the inside of the container 81 ismaintained in the vacuum atmosphere, and an upper opening of thecontainer 81 is sealed by the cover 86.

In the gyro element 2, since the weights 13 a, 13 b, 13 c and 13 d thatare provided in the first, second, third and fourth drive vibrating arms441, 442, 443 and 444 include the first weights 12 a, 12 b, 12 c and 12d and the second weights 11 a, 11 b, 11 c and 11 d, it is possible toreduce temperature drift of the gyro element 2. Accordingly, the gyrosensor 80 that uses the gyro element 2 also has a stable characteristicin which the temperature drift is reduced.

Electronic Apparatus

Next, an electronic apparatus to which the gyro element 2 that is thevibrator element according to one embodiment of the invention, thevibrator 1 that uses the gyro element 2 that is the vibrator element, orthe gyro sensor 80 that is the electronic device is applied will bedescribed in detail referring to FIGS. 12 to 14. In this description, anexample in which the vibrator 1 that uses the gyro element 2 that is thevibrator element is applied will be described.

FIG. 12 is a perspective view schematically illustrating a configurationof a mobile (notebook type) personal computer that is an electronicapparatus that includes the vibrator 1 according to the embodiment ofthe invention. In the figure, a personal computer 1100 includes a mainbody 1104 that includes a keyboard 1102, and a display unit 1106 thatincludes a display section 100. The display unit 1106 is supported to berotatable to the main body 1104 through a hinge structure. The vibrator1 that uses the gyro element 2 having a function of detecting an angularvelocity is installed in the personal computer 1100.

FIG. 13 is a perspective view schematically illustrating a configurationof a mobile phone (also including PHS) that is an electronic apparatusthat includes the vibrator 1 according to the embodiment of theinvention. In the figure, a mobile phone 1200 includes plural operationbuttons 1202, an ear piece 1204, and a mouth piece 1206. A displaysection 100 is disposed between the operation buttons 1202 and the earpiece 1204. The vibrator 1 that uses the gyro element 2 having afunction as an angular velocity sensor is installed in the mobile phone1200.

FIG. 14 is a perspective view schematically illustrating a configurationof a digital still camera that is an electronic apparatus that includesthe vibrator 1 according to the embodiment of the invention. In FIG. 14,connection with an external device is briefly shown. Here, a normalcamera exposes a silver-halide photo film by a light image of an object,but a digital still camera 1300 performs photo-electric conversion forthe light image of the object using an imaging element such as a chargecoupled device (CCD) to generate an imaging signal (image signal).

The display section 100 is provided on a rear surface of a case (body)1302 of the digital still camera 1300, which performs display on thebasis of the imaging signal generated by the CCD. The display section100 functions as a finder that displays the object as an electronicimage. Further, a light receiving unit 1304 that includes an opticallens (imaging optical system), an CCD and the like is provided on afront side (rear side in the figure) of the case 1302.

If a user confirms the image of the object displayed on the displaysection 100 and presses a shutter button 1306, the imaging signal of theCCD at that time is transmitted to and stored in a memory 1308. Further,in the digital still camera 1300, a video signal output terminal 1312and a data communication input and output terminal 1314 are provided ona side surface of the case 1302. As shown in the figure, a TV monitor1430 is connected to the video signal output terminal 1312, and apersonal computer 1440 is connected to the data communication input andoutput terminal 1314, as necessary. Further, the imaging signal storedin the memory 1308 is output to the TV monitor 1430 or the personalcomputer 1440 according to a predetermined operation. The vibrator 1that uses the gyro element 2 that functions as an angular velocitysensor or the like is built in the digital still camera 1300.

The vibrator 1 according to the embodiment of the invention may beapplied to electronic apparatuses such as an inkjet discharge apparatus(for example, inkjet printer), a laptop personal computer, a television,a video camera, a video tape recorder, a car navigation apparatus, apager, an electronic organizer (including communication functions), anelectronic dictionary, a calculator, an electronic game machine, a wordprocessor, a workstation, a TV phone, a security TV monitor, electronicbinoculars, a POS terminal, a medical apparatus (for example, electronicthermometer, sphygmomanometer, blood glucose monitoring system,electrocardiogram measurement apparatus, ultrasonic diagnosticapparatus, or electronic endoscope), a fish finder, various measurementapparatuses, meters (for example, meters of vehicles, airplanes orships), a flight simulator, in addition to the personal computer (mobilepersonal computer) in FIG. 12, the mobile phone in FIG. 13 and thedigital still camera in FIG. 14.

Moving Body

FIG. 15 is a perspective view schematically illustrating an automobilethat is an example of a moving body. The vibrator 1 that uses the gyroelement 2 according to the embodiment of the invention is mounted in anautomobile 106. For example, as shown in FIG. 15, in the automobile 106that is the moving body, an electronic control unit 108 that is builttherein with the vibrator 1 that uses the gyro element 2 to control atire 109 or the like is mounted in a vehicle body 107. Further, thevibrator 1 may be widely applied to an electronic control unit (ECU)such as a keyless entry, an immobilizer, a car navigation system, a carair conditioner, an anti-lock braking system (ABS), an air bag, a tirepressure monitoring system (TPMS), an engine controller, a batterymonitor of a hybrid automobile or electric automobile or a vehicle bodyattitude control system.

1. A vibrator element comprising: a base portion; a vibrating arm thatextends from the base portion, the vibrating arm having a proximal endnear the base and a distal end opposite the proximal end; a first weightprovided at the distal end of the vibrating arm, the first weight beingspaced apart from a tip of the vibrating arm toward the base portion;and a second weight that is provided between the first weight and thetip of the vibrating arm, wherein, an area of a first region where thefirst weight is provided is A1, an area of an entire region between anedge of the first weight and the tip of the vibrating arm is A2, a massof the first weight is B1, and a mass of the second weight is B2, andB1/A1>B2/A2.
 2. The vibrator element according to claim 1, wherein thesecond weight has a width that is smaller than that of the first weightin a direction that is orthogonal to an extension direction of thevibrating arm.
 3. The vibrator element according to claim 1, wherein thesecond weight is provided in an approximately central portion of thevibrating arm in a direction that is orthogonal to an extensiondirection of the vibrating arm.
 4. The vibrator element according toclaim 2, wherein the second weight is provided in an approximatelycentral portion of the vibrating arm in a direction that is orthogonalto an extension direction of the vibrating arm.
 5. The vibrator elementaccording to claim 1, wherein the second weight comprises a plurality ofweights.
 6. The vibrator element according to claim 2, wherein thesecond weight comprises a plurality of weights.
 7. The vibrator elementaccording to claim 1, wherein the first weight is spaced apart from sideend of the vibrating arm, the side end extending along an extensiondirection of the vibrating arm.
 8. The vibrator element according toclaim 1, wherein the vibrating arm has a wide portion that is wider in adirection that is orthogonal to an extension direction of the vibratingarm in a plan view than a remainder of the vibrating arm, and whereinthe first weight and the second weight are provided in the wide portion.9. The vibrator element according to claim 1, further comprising: a pairof detection vibrating arms that extend from the base portion inopposite directions.
 10. The vibrator element according to claim 2,wherein the vibrating arm has a wide portion that is wider in adirection that is orthogonal to an extension direction of the vibratingarm in a plan view than a remainder of the vibrating arm, and whereinthe first weight and the second weight are provided in the wide portion.11. The vibrator element according to claim 3, wherein the vibrating armhas a wide portion that is wider in a direction that is orthogonal to anextension direction of the vibrating arm in a plan view than a remainderof the vibrating arm, and wherein the first weight and the second weightare provided in the wide portion.
 12. The vibrator element according toclaim 4, wherein the vibrating arm has a wide portion that is wider in adirection that is orthogonal to an extension direction of the vibratingarm in a plan view than a remainder of the vibrating arm, and whereinthe first weight and the second weight are provided in the wide portion.13. The vibrator element according to claim 5, wherein the vibrating armhas a wide portion that is wider in a direction that is orthogonal to anextension direction of the vibrating arm in a plan view than a remainderof the vibrating arm, and wherein the first weight and the second weightare provided in the wide portion.
 14. The vibrator element according toclaim 6, wherein the vibrating arm has a wide portion that is wider in adirection that is orthogonal to an extension direction of the vibratingarm in a plan view than a remainder of the vibrating arm, and whereinthe first weight and the second weight are provided in the wide portion.15. A method of manufacturing a vibrator element comprising: forming abase portion and a vibrating arm that extend from the base portion, thevibrating arm having a proximal end near the base and a distal endopposite the proximal end; forming a first weight at the distal end ofthe vibrating arm, the first weight being spaced apart from a tip of thevibrating arm toward the base portion; forming a second weight betweenthe first weight and the tip of the vibrating arm; and adjusting aresonance frequency of the vibrating arm by one of: removing at least apart of at least one of the first weight and the second weight, orincreasing a mass of at least one of the first weight and the secondweight, wherein an area of a first region where the first weight isprovided is A1, an area of an entire region between an edge of the firstweight and the tip of the vibrating arm is A2, a mass of the firstweight is B1, and a mass of the second weight is B2, and B1/A1>B2/A2.16. The method according to claim 15, wherein the forming of the firstweight and the forming of the second weight further comprises: formingthe first weight on the vibrating arm such that the first weight isspaced apart from the tip of the vibrating arm toward the base portion;and forming the second weight in the region between the edge of thefirst weight and the tip of the vibrating arm.
 17. A vibratorcomprising: the vibrator element according to claim 1; and a packagethat accommodates the vibrator element.
 18. An electronic devicecomprising: the vibrator element according to claim 1; and a circuitelement that drives the vibrator element.
 19. An electronic apparatuscomprising the vibrator element according to claim
 1. 20. A moving bodycomprising the vibrator element according to claim 1.